集束型晶圆制造装备调度及其优化算法-宝阳悦读网

　　　　

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集束型晶圆制造装备调度及其优化算法

作者：李林瑛

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mobi/epub/pdf/awz3

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内容简介:

本书以集束型晶圆制造装备为研究对象，在全面分析其调度特点及调度方法的基础上，分析集束型装备各类调度问题，运用优化调度方法设计了相应的求解方案。本书提出的方法和技术将为广大企业、科研院所、高等院校进一步深入研究集束型晶圆制造装备调度问题提供理论基础，为推动集束型晶圆制造装备调度技术发展和企业实际应用提供参考，对提升我国晶圆制造企业的核心技术竞争力及行业综合实力具有重要意义。

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